Inventor
TORKKELI ALTTI
FI19 patents
⚠️ This page may combine multiple inventors who share the name “TORKKELI ALTTI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MURATA MANUFACTURING CO
11 patentsUS10969575B2Apr 6, 2021
MEMS reflector with center support
MURATA MANUFACTURING CO2 citations72
US10281718B2May 7, 2019
Scanning MEMS reflector system
MURATA MANUFACTURING CO2 citations72
US10914939B2Feb 9, 2021
MEMS reflector system
MURATA MANUFACTURING CO1 citations62
US12043542B2Jul 23, 2024
MEMS structure including a cap with a via
MURATA MANUFACTURING CO0 citations51
US11526000B2Dec 13, 2022
Two-axis MEMS mirror with separated drives
MURATA MANUFACTURING CO0 citations51
US9764942B2Sep 19, 2017
Multi-level micromechanical structure
MURATA MANUFACTURING CO0 citations51
US9556021B2Jan 31, 2017
Method of manufacturing a MEMS structure and use of the method
MURATA MANUFACTURING CO0 citations51
US9334160B2May 10, 2016
Method of manufacturing a MEMS structure
MURATA MANUFACTURING CO0 citations51
US9969615B2May 15, 2018
Manufacturing method of a multi-level micromechanical structure on a single layer of homogenous material
MURATA MANUFACTURING CO0 citations41
US12202725B2Jan 21, 2025
Method for bonding wafers, and a wafer
MURATA MANUFACTURING CO0 citations39
US10377625B2Aug 13, 2019
Scanning mirror device and a method for manufacturing it
MURATA MANUFACTURING CO0 citations36
KLEMETTI PETRI
3 patentsUS8104343B2Jan 31, 2012
Vibrating micromechanical sensor of angular velocity
KLEMETTI PETRI10 citations78
US8646333B2Feb 11, 2014
Vibrating micromechanical sensor of angular velocity
KLEMETTI PETRI1 citations57
US8635909B2Jan 28, 2014
Vibrating micromechanical sensor of angular velocity
KLEMETTI PETRI1 citations57