Inventor
BISE RYAN
US11 patents
⚠️ This page may combine multiple inventors who share the name “BISE RYAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
7 patentsUS10325759B2Jun 18, 2019
Multiple control modes
LAM RES CORP11 citations81
US11594400B2Feb 28, 2023
Multi zone gas injection upper electrode system
LAM RES CORP6 citations74
US9396910B2Jul 19, 2016
Heat transfer plate for a showerhead electrode assembly of a capacitively coupled plasma processing apparatus
LAM RES CORP3 citations72
US10431431B2Oct 1, 2019
Gas supply delivery arrangement including a gas splitter for tunable gas flow control
LAM RES CORP6 citations68
US9245718B2Jan 26, 2016
Showerhead electrode assembly in a capacitively coupled plasma processing apparatus
LAM RES CORP1 citations62
US9018022B2Apr 28, 2015
Showerhead electrode assembly in a capacitively coupled plasma processing apparatus
LAM RES CORP3 citations62
US10366869B2Jul 30, 2019
Active feedback control of subsystems of a process module
LAM RES CORP0 citations36