P

Inventor

L'BASSI MICHAEL

US18 patents
⚠️ This page may combine multiple inventors who share the name “L'BASSI MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MKS INSTR INC

14 patents
US7706925B2Apr 27, 2010

Integrated pressure and flow ratio control system

MKS INSTR INC23 citations92
US7467027B2Dec 16, 2008

Compensation for thermal siphoning in mass flow controllers

MKS INSTR INC29 citations92
US7000465B1Feb 21, 2006

Attitude error self-correction for thermal sensors of mass flow meters and controllers

MKS INSTR INC22 citations86
US10649471B2May 12, 2020

Method and apparatus for pulse gas delivery with isolation valves

MKS INSTR INC7 citations83
US10725484B2Jul 28, 2020

Method and apparatus for pulse gas delivery using an external pressure trigger

MKS INSTR INC5 citations82
US10031004B2Jul 24, 2018

Methods and apparatus for wide range mass flow verification

MKS INSTR INC9 citations82
US11404290B2Aug 2, 2022

Method and apparatus for pulse gas delivery

MKS INSTR INC2 citations73
US10514712B2Dec 24, 2019

Method and apparatus for pressure-based flow measurement in non-critical flow conditions

MKS INSTR INC3 citations73
US7296465B2Nov 20, 2007

Vertical mount mass flow sensor

MKS INSTR INC9 citations73
US10126760B2Nov 13, 2018

System for and method of fast pulse gas delivery

MKS INSTR INC4 citations72
US10698426B2Jun 30, 2020

Methods and apparatus for multiple channel mass flow and ratio control systems

MKS INSTR INC4 citations71
US10969799B2Apr 6, 2021

System for and method of fast pulse gas delivery

MKS INSTR INC1 citations62
US11513542B2Nov 29, 2022

Method and apparatus for pulse gas delivery using an external pressure trigger

MKS INSTR INC0 citations60
US12264950B2Apr 1, 2025

Method and apparatus for mass flow verification

MKS INSTR INC0 citations52

DING JUNHUA

2 patents

MKS INC

1 patent

L BASSI MICHAEL

1 patent