Inventor
L'BASSI MICHAEL
US18 patents
⚠️ This page may combine multiple inventors who share the name “L'BASSI MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MKS INSTR INC
14 patentsUS7706925B2Apr 27, 2010
Integrated pressure and flow ratio control system
MKS INSTR INC23 citations92
US7467027B2Dec 16, 2008
Compensation for thermal siphoning in mass flow controllers
MKS INSTR INC29 citations92
US7000465B1Feb 21, 2006
Attitude error self-correction for thermal sensors of mass flow meters and controllers
MKS INSTR INC22 citations86
US10649471B2May 12, 2020
Method and apparatus for pulse gas delivery with isolation valves
MKS INSTR INC7 citations83
US10725484B2Jul 28, 2020
Method and apparatus for pulse gas delivery using an external pressure trigger
MKS INSTR INC5 citations82
US10031004B2Jul 24, 2018
Methods and apparatus for wide range mass flow verification
MKS INSTR INC9 citations82
US11404290B2Aug 2, 2022
Method and apparatus for pulse gas delivery
MKS INSTR INC2 citations73
US10514712B2Dec 24, 2019
Method and apparatus for pressure-based flow measurement in non-critical flow conditions
MKS INSTR INC3 citations73
US7296465B2Nov 20, 2007
Vertical mount mass flow sensor
MKS INSTR INC9 citations73
US10126760B2Nov 13, 2018
System for and method of fast pulse gas delivery
MKS INSTR INC4 citations72
US10698426B2Jun 30, 2020
Methods and apparatus for multiple channel mass flow and ratio control systems
MKS INSTR INC4 citations71
US10969799B2Apr 6, 2021
System for and method of fast pulse gas delivery
MKS INSTR INC1 citations62
US11513542B2Nov 29, 2022
Method and apparatus for pulse gas delivery using an external pressure trigger
MKS INSTR INC0 citations60
US12264950B2Apr 1, 2025
Method and apparatus for mass flow verification
MKS INSTR INC0 citations52