Inventor
KASHIYAMA MASAHITO
JP17 patents
⚠️ This page may combine multiple inventors who share the name “KASHIYAMA MASAHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
12 patentsUS10790165B2Sep 29, 2020
Pump apparatus and substrate treating apparatus
SCREEN HOLDINGS CO LTD2 citations71
US10507484B2Dec 17, 2019
Pump apparatus and substrate treating apparatus
SCREEN HOLDINGS CO LTD2 citations71
US10920764B2Feb 16, 2021
Pumping apparatus, treatment solution supplying device, substrate treating apparatus, liquid draining method, and liquid replacing method
SCREEN HOLDINGS CO LTD3 citations69
US11358076B2Jun 14, 2022
Filter coupling device and substrate treating apparatus provided therewith
SCREEN HOLDINGS CO LTD5 citations64
US11404629B2Aug 2, 2022
Treating solution supply apparatus
SCREEN HOLDINGS CO LTD0 citations48
US11000783B2May 11, 2021
Pumping apparatus, treatment solution supplying device, and substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations48
US10818520B2Oct 27, 2020
Substrate treating apparatus and substrate treating method
SCREEN HOLDINGS CO LTD0 citations47
US10056270B2Aug 21, 2018
Substrate treating apparatus and substrate treating method
SCREEN HOLDINGS CO LTD0 citations47
US11114316B2Sep 7, 2021
Substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations45
US10617983B2Apr 14, 2020
Filter coupling device and a substrate treating apparatus having same
SCREEN HOLDINGS CO LTD0 citations41
US10824074B2Nov 3, 2020
Liquid processing apparatus and liquid processing method
SCREEN HOLDINGS CO LTD0 citations40
US10627836B2Apr 21, 2020
Pumping apparatus and substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations39
KASHIYAMA MASAHITO
4 patentsUS9508573B2Nov 29, 2016
Substrate processing apparatus and substrate processing method
KASHIYAMA MASAHITO3 citations70
US8477301B2Jul 2, 2013
Substrate processing apparatus, substrate processing system and inspection/periphery exposure apparatus
KASHIYAMA MASAHITO4 citations60
US9465293B2Oct 11, 2016
Substrate processing apparatus and substrate processing method
KASHIYAMA MASAHITO0 citations39
US9685363B2Jun 20, 2017
Alignment device and substrate processing apparatus
KASHIYAMA MASAHITO0 citations38