Inventor
CHEN OTTO
TW9 patents
⚠️ This page may combine multiple inventors who share the name “CHEN OTTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
7 patentsUS11996276B2May 28, 2024
Ion collector for use in plasma systems
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations70
US10553411B2Feb 4, 2020
Ion collector for use in plasma systems
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations64
US11569099B2Jan 31, 2023
Wafer cooling system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12548745B2Feb 10, 2026
Ion collector for use in plasma systems
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11581169B2Feb 14, 2023
Ion collector for use in plasma systems
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12170208B2Dec 17, 2024
Method for managing temperature in semiconductor fabrication facility
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US10872789B2Dec 22, 2020
Wafer cooling system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50