Inventor
MIWA TAKAFUMI
JP19 patents
⚠️ This page may combine multiple inventors who share the name “MIWA TAKAFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
16 patentsUS11043359B2Jun 22, 2021
Charged particle beam apparatus and charged particle beam inspection system
HITACHI HIGH TECH CORP14 citations85
US9236220B2Jan 12, 2016
Electronic microscope, setting method of observation condition of electronic microscope, and observation method using electronic microscope
HITACHI HIGH TECH CORP8 citations84
US11011348B2May 18, 2021
Scanning electron microscope and sample observation method using scanning electron microscope
HITACHI HIGH TECH CORP8 citations83
US10872742B2Dec 22, 2020
Charged particle beam device
HITACHI HIGH TECH CORP8 citations83
US10134558B2Nov 20, 2018
Scanning electron microscope
HITACHI HIGH TECH CORP2 citations73
US9543053B2Jan 10, 2017
Electron beam equipment
HITACHI HIGH TECH CORP3 citations73
US11398367B2Jul 26, 2022
Charged particle beam apparatus
HITACHI HIGH TECH CORP4 citations72
US11398366B2Jul 26, 2022
Charged particle beam apparatus
HITACHI HIGH TECH CORP2 citations72
US11749494B2Sep 5, 2023
Charged particle beam apparatus
HITACHI HIGH TECH CORP1 citations62
US11735394B2Aug 22, 2023
Charged particle beam apparatus
HITACHI HIGH TECH CORP1 citations62
US11646172B2May 9, 2023
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations62
US11143606B2Oct 12, 2021
Particle measuring device and particle measuring method
HITACHI HIGH TECH CORP0 citations62
US12106930B2Oct 1, 2024
Charged particle beam device
HITACHI HIGH TECH CORP1 citations60
US11335535B2May 17, 2022
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations51
US9202668B2Dec 1, 2015
Observation specimen for use in electron microscopy, electron microscopy, electron microscope, and device for producing observation specimen
HITACHI HIGH TECH CORP0 citations51
US9799486B2Oct 24, 2017
Charged particle beam apparatus for measuring surface potential of a sample
HITACHI HIGH TECH CORP0 citations41