Inventor
COADY MATTHEW W
US13 patents
⚠️ This page may combine multiple inventors who share the name “COADY MATTHEW W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BROOKS AUTOMATION INC
6 patentsUS10615068B2Apr 7, 2020
Substrate handling system for aligning and orienting substrates during a transfer operation
BROOKS AUTOMATION INC3 citations71
US9691651B2Jun 27, 2017
Substrate handling system for aligning and orienting substrates during a transfer operation
BROOKS AUTOMATION INC3 citations71
US10742092B2Aug 11, 2020
Position feedback for sealed environments
BROOKS AUTOMATION INC1 citations70
US11121017B2Sep 14, 2021
Load port module
BROOKS AUTOMATION INC2 citations68
US8016541B2Sep 13, 2011
Substrate handling system for aligning and orienting substrates during a transfer operation
BROOKS AUTOMATION INC4 citations61
US11404939B2Aug 2, 2022
Position feedback for sealed environments
BROOKS AUTOMATION INC0 citations60
ALERT INNOVATION INC
2 patentsUS10919701B2Feb 16, 2021
Interchangeable automated mobile robots with a plurality of operating modes configuring a plurality of different robot task capabilities
ALERT INNOVATION INC9 citations85
US11623342B2Apr 11, 2023
Configurable service isolation zones for service of equipment employing mobile robots
ALERT INNOVATION INC7 citations75