Inventor
MCNAMARA ELLIOTT GERARD
NL21 patents
Patents
21 patentsUS10615084B2Apr 7, 2020
Method and apparatus to determine a patterning process parameter, associated with a change in a physical configuration, using measured pixel optical characteristic values
ASML NETHERLANDS BV9 citations92
US10546790B2Jan 28, 2020
Method and apparatus to determine a patterning process parameter
ASML NETHERLANDS BV7 citations92
US10453758B2Oct 22, 2019
Method and apparatus to determine a patterning process parameter using an asymmetric optical characteristic distribution portion
ASML NETHERLANDS BV9 citations92
US12142535B2Nov 12, 2024
Method and apparatus to determine a patterning process parameter using a unit cell having geometric symmetry
ASML NETHERLANDS BV2 citations84
US11784098B2Oct 10, 2023
Method and apparatus to determine a patterning process parameter
ASML NETHERLANDS BV3 citations84
US11145557B2Oct 12, 2021
Method and apparatus to determine a patterning process parameter
ASML NETHERLANDS BV5 citations84
US11101184B2Aug 24, 2021
Method and apparatus to determine a patterning process parameter
ASML NETHERLANDS BV2 citations84
US10811323B2Oct 20, 2020
Method and apparatus to determine a patterning process parameter
ASML NETHERLANDS BV4 citations82
US11774862B2Oct 3, 2023
Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus
ASML NETHERLANDS BV4 citations72
US11385553B2Jul 12, 2022
Metrology method, patterning device, apparatus and computer program
ASML NETHERLANDS BV2 citations72
US10996570B2May 4, 2021
Metrology method, patterning device, apparatus and computer program
ASML NETHERLANDS BV2 citations72
US10782617B2Sep 22, 2020
Method and apparatus to determine a patterning process parameter
ASML NETHERLANDS BV4 citations72
US11947269B2Apr 2, 2024
Method and apparatus to determine a patterning process parameter
ASML NETHERLANDS BV2 citations71
US11143972B2Oct 12, 2021
Method and apparatus to determine a patterning process parameter
ASML NETHERLANDS BV1 citations71
US11175591B2Nov 16, 2021
Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus
ASML NETHERLANDS BV2 citations70
US12322660B2Jun 3, 2025
Method and apparatus to determine a patterning process parameter
ASML NETHERLANDS BV0 citations62
US11728224B2Aug 15, 2023
Method and apparatus to determine a patterning process parameter
ASML NETHERLANDS BV0 citations62
US11101185B2Aug 24, 2021
Method and apparatus to determine a patterning process parameter
ASML NETHERLANDS BV0 citations62
US11710668B2Jul 25, 2023
Method and apparatus to determine a patterning process parameter
ASML NETHERLANDS BV0 citations61
US10955744B2Mar 23, 2021
Method of determining a parameter of a pattern transfer process, device manufacturing method
ASML NETHERLANDS BV1 citations55
US12468234B2Nov 11, 2025
Method of controlling a patterning process, device manufacturing method
ASML NETHERLANDS BV0 citations49