Inventor
DE LA FUENTE VALENTIN MARIA ISABEL
NL7 patents
Patents
7 patentsUS10811323B2Oct 20, 2020
Method and apparatus to determine a patterning process parameter
ASML NETHERLANDS BV4 citations82
US11947269B2Apr 2, 2024
Method and apparatus to determine a patterning process parameter
ASML NETHERLANDS BV2 citations71
US11143972B2Oct 12, 2021
Method and apparatus to determine a patterning process parameter
ASML NETHERLANDS BV1 citations71
US11710668B2Jul 25, 2023
Method and apparatus to determine a patterning process parameter
ASML NETHERLANDS BV0 citations61
US12468235B2Nov 11, 2025
Method and apparatus to determine a patterning process parameter
ASML NETHERLANDS BV0 citations60
US11506566B2Nov 22, 2022
Method of processing data, method of obtaining calibration data
ASML NETHERLANDS BV1 citations53
US11531274B2Dec 20, 2022
Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets
ASML NETHERLANDS BV1 citations51