Inventor
SHAHRJERDY MIR HOMAYOUN
NL4 patents
Patents
4 patentsUS11947269B2Apr 2, 2024
Method and apparatus to determine a patterning process parameter
ASML NETHERLANDS BV2 citations71
US11143972B2Oct 12, 2021
Method and apparatus to determine a patterning process parameter
ASML NETHERLANDS BV1 citations71
US10578982B2Mar 3, 2020
Substrate measurement recipe design of, or for, a target including a latent image
ASML NETHERLANDS BV4 citations70
US12468235B2Nov 11, 2025
Method and apparatus to determine a patterning process parameter
ASML NETHERLANDS BV0 citations60