Inventor
SAITO MICHISHIGE
JP18 patents
⚠️ This page may combine multiple inventors who share the name “SAITO MICHISHIGE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
16 patentsUS7506610B2Mar 24, 2009
Plasma processing apparatus and method
TOKYO ELECTRON LTD15 citations84
US7494561B2Feb 24, 2009
Plasma processing apparatus and method, and electrode plate for plasma processing apparatus
TOKYO ELECTRON LTD12 citations84
US9613837B2Apr 4, 2017
Substrate processing apparatus and maintenance method thereof
TOKYO ELECTRON LTD4 citations71
US11742183B2Aug 29, 2023
Plasma processing apparatus and control method
TOKYO ELECTRON LTD3 citations69
US11532461B2Dec 20, 2022
Substrate processing apparatus
TOKYO ELECTRON LTD2 citations69
US11201034B2Dec 14, 2021
Plasma processing apparatus and control method
TOKYO ELECTRON LTD5 citations69
US6620245B2Sep 16, 2003
Liquid coating apparatus with temperature controlling manifold
TOKYO ELECTRON LTD12 citations69
US12288676B2Apr 29, 2025
Stage and substrate processing apparatus
TOKYO ELECTRON LTD0 citations62
US11919032B2Mar 5, 2024
Film forming apparatus and method for manufacturing part having film containing silicon
TOKYO ELECTRON LTD0 citations62
US11967487B2Apr 23, 2024
Forming method of component and plasma processing apparatus
TOKYO ELECTRON LTD0 citations61
US11515125B2Nov 29, 2022
Upper electrode and plasma processing apparatus
TOKYO ELECTRON LTD0 citations61
US11764040B2Sep 19, 2023
Placing table and substrate processing apparatus
TOKYO ELECTRON LTD0 citations60
US11443922B2Sep 13, 2022
High frequency power supply member and plasma processing apparatus
TOKYO ELECTRON LTD0 citations52
US12494349B2Dec 9, 2025
Member, manufacturing method of member and substrate processing apparatus
TOKYO ELECTRON LTD0 citations51
US12300475B2May 13, 2025
Substrate support and substrate processing apparatus
TOKYO ELECTRON LTD0 citations51
US11981993B2May 14, 2024
Forming method of component and substrate processing system
TOKYO ELECTRON LTD0 citations51