Inventor

DANYLYUK SERHIY

DE2 patents

⚠️ This page may combine multiple inventors who share the name “DANYLYUK SERHIY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

1 patent

US10067074B2Sep 4, 2018

Metrology methods, metrology apparatus and device manufacturing method

ASML NETHERLANDS BV6 citations67

KLEIN NORBERT

1 patent

US8410792B2Apr 2, 2013

Resonator arrangement and method for analyzing a sample using the resonator arrangement

KLEIN NORBERT0 citations30