Inventor

HONG KUO-WEI

JP5 patents

⚠️ This page may combine multiple inventors who share the name “HONG KUO-WEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEE WOO JIN

2 patents

US8415259B2Apr 9, 2013

Method of depositing dielectric film by modified PEALD method

LEE WOO JIN520 citations98

US8173554B2May 8, 2012

Method of depositing dielectric film having Si-N bonds by modified peald method

LEE WOO JIN572 citations96

KOBAYASHI AKIKO

1 patent

US8647722B2Feb 11, 2014

Method of forming insulation film using plasma treatment cycles

KOBAYASHI AKIKO541 citations98

HONG KUO-WEI

1 patent

US8394466B2Mar 12, 2013

Method of forming conformal film having si-N bonds on high-aspect ratio pattern

HONG KUO-WEI591 citations97

LEE WOO-JIN

1 patent

US8334219B2Dec 18, 2012

Method of forming stress-tuned dielectric film having Si-N bonds by modified PEALD

LEE WOO-JIN520 citations96