Inventor

JEONG DAEKYUN

KR5 patents

⚠️ This page may combine multiple inventors who share the name “JEONG DAEKYUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHINRIKI HIROSHI

2 patents

US8084104B2Dec 27, 2011

Atomic composition controlled ruthenium alloy film formed by plasma-enhanced atomic layer deposition

SHINRIKI HIROSHI464 citations97

US8133555B2Mar 13, 2012

Method for forming metal film by ALD using beta-diketone metal complex

SHINRIKI HIROSHI3 citations60

LEE WOO JIN

1 patent

US8415259B2Apr 9, 2013

Method of depositing dielectric film by modified PEALD method

LEE WOO JIN520 citations98

ASM JAPAN

1 patent

US7655564B2Feb 2, 2010

Method for forming Ta-Ru liner layer for Cu wiring

ASM JAPAN36 citations91

UNIV KOOKMIN IND ACAD COOP FOUND

1 patent

US9633930B2Apr 25, 2017

Method of forming through-hole in silicon substrate, method of forming electrical connection element penetrating silicon substrate and semiconductor device manufactured thereby

UNIV KOOKMIN IND ACAD COOP FOUND0 citations37