Inventor
HAHTO SAMI K
US18 patents
⚠️ This page may combine multiple inventors who share the name “HAHTO SAMI K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NISSIN ION EQUIPMENT CO LTD
10 patentsUS9865422B2Jan 9, 2018
Plasma generator with at least one non-metallic component
NISSIN ION EQUIPMENT CO LTD3 citations73
US8994272B2Mar 31, 2015
Ion source having at least one electron gun comprising a gas inlet and a plasma region defined by an anode and a ground element thereof
NISSIN ION EQUIPMENT CO LTD5 citations73
US9142386B2Sep 22, 2015
Ion beam line
NISSIN ION EQUIPMENT CO LTD5 citations71
US12112915B2Oct 8, 2024
Vaporizer, ion source and method for generating aluminum-containing vapor
NISSIN ION EQUIPMENT CO LTD2 citations68
US9502213B2Nov 22, 2016
Ion beam line
NISSIN ION EQUIPMENT CO LTD2 citations62
US9275819B2Mar 1, 2016
Magnetic field sources for an ion source
NISSIN ION EQUIPMENT CO LTD2 citations61
US11017974B2May 25, 2021
Ion source
NISSIN ION EQUIPMENT CO LTD1 citations58
US12328807B2Jun 10, 2025
Vaporizer, ion source and method for generating aluminum-containing vapor
NISSIN ION EQUIPMENT CO LTD0 citations53
US9734982B1Aug 15, 2017
Beam current density distribution adjustment device and ion implanter
NISSIN ION EQUIPMENT CO LTD1 citations52
US10153134B1Dec 11, 2018
Plasma generation system
NISSIN ION EQUIPMENT CO LTD0 citations34