Inventor
BAKIN DMITRY V
US9 patents
⚠️ This page may combine multiple inventors who share the name “BAKIN DMITRY V”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LUXTRON CORP
4 patentsUS7042581B2May 9, 2006
Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers
LUXTRON CORP34 citations91
US6654132B1Nov 25, 2003
Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers
LUXTRON CORP35 citations91
US6222632B1Apr 24, 2001
Polarization interferometer spectrometer with rotatable birefringent element
LUXTRON CORP21 citations91
US6934040B1Aug 23, 2005
Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers
LUXTRON CORP10 citations72