Inventor
MIYASHITA KINYA
JP15 patents
⚠️ This page may combine multiple inventors who share the name “MIYASHITA KINYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CREATIVE TECH CORP
7 patentsUS7881036B2Feb 1, 2011
Electrode sheet for electrostatic chuck, and electrostatic chuck
CREATIVE TECH CORP24 citations92
US6813134B2Nov 2, 2004
Electrostatic chucking device and manufacturing method thereof
CREATIVE TECH CORP23 citations92
US7567421B2Jul 28, 2009
Bipolar electrostatic chuck
CREATIVE TECH CORP11 citations83
US8051548B2Nov 8, 2011
Method of manufacturing an electrostatic chuck
CREATIVE TECH CORP4 citations62
US8027171B2Sep 27, 2011
Feeding structure of electrostatic chuck, method for producing the same, and method for regenerating feeding structure of electrostatic chuck
CREATIVE TECH CORP2 citations62
US7411773B2Aug 12, 2008
Electrostatic chucking device and manufacturing method thereof
CREATIVE TECH CORP2 citations62
US7300707B2Nov 27, 2007
Aluminium composite structure having a channel therein and method of manufacturing the same
CREATIVE TECH CORP0 citations51