Inventor
WADA HIROTSUGU
JP13 patents
⚠️ This page may combine multiple inventors who share the name “WADA HIROTSUGU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
6 patentsUS5254417AOct 19, 1993
Reflection mask and electrically charged beam exposing apparatus using the reflection mask
TOSHIBA KK25 citations92
US5047646ASep 10, 1991
Method of correcting astigmatism of variable shaped beam
TOSHIBA KK35 citations92
US5234780AAug 10, 1993
Exposure mask, method of manufacturing the same, and exposure method using the same
TOSHIBA KK20 citations82
US4636968AJan 13, 1987
Method of positioning a beam to a specific portion of a semiconductor wafer
TOSHIBA KK20 citations80
US5843603ADec 1, 1998
Method of evaluating shaped beam of charged beam writer and method of forming pattern
TOSHIBA KK14 citations73
US5358808AOct 25, 1994
Exposure mask, method of manufacturing the same, and exposure method using the same
TOSHIBA KK10 citations70
TOKYO SHIBAURA ELECTRIC CO
3 patentsUS4543512ASep 24, 1985
Electron beam exposure system
TOKYO SHIBAURA ELECTRIC CO34 citations92
US4647782AMar 3, 1987
Charged particle beam exposure apparatus
TOKYO SHIBAURA ELECTRIC CO19 citations73
US4558225ADec 10, 1985
Target body position measuring method for charged particle beam fine pattern exposure system
TOKYO SHIBAURA ELECTRIC CO15 citations73