Inventor
MIYAGI KATSUSHIN
JP9 patents
⚠️ This page may combine multiple inventors who share the name “MIYAGI KATSUSHIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS5421892AJun 6, 1995
Vertical heat treating apparatus
TOKYO ELECTRON LTD61 citations95
US5370371ADec 6, 1994
Heat treatment apparatus
TOKYO ELECTRON LTD30 citations92
US5611863AMar 18, 1997
Semiconductor processing apparatus and cleaning method thereof
TOKYO ELECTRON LTD46 citations91
US5433784AJul 18, 1995
Vertical treating apparatus having a restricting means for avoiding misalignment
TOKYO ELECTRON LTD38 citations91
US5422081AJun 6, 1995
Trap device for vapor phase reaction apparatus
TOKYO ELECTRON LTD41 citations89
US5622639AApr 22, 1997
Heat treating apparatus
TOKYO ELECTRON LTD43 citations88
US5540782AJul 30, 1996
Heat treating apparatus having heat transmission-preventing plates
TOKYO ELECTRON LTD44 citations86
US5445522AAug 29, 1995
Combustion device
TOKYO ELECTRON LTD8 citations73