Inventor

SUEN SHU-HUEI

TW19 patents

⚠️ This page may combine multiple inventors who share the name “SUEN SHU-HUEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUEN SHU-HUEI

TAIWAN SEMICONDUCTOR MFG CO LTD

Method of forming a semiconductor device

DC bias in plasma process

Dry ashing by secondary excitation

Method of forming a semiconductor device

Method of manufacturing semiconductor devices

Method of manufacturing semiconductor devices

Method of forming a semiconductor device

Method of forming a semiconductor device

DC bias in plasma process

DC bias in plasma process

Pattern formation method and method for manufacturing a semiconductor device

Pattern formation method and method for manufacturing a semiconductor device

Metal contacts on metal gates and methods thereof

Method for manufacturing a semiconductor device

Semiconductor device structure and method for forming the same

TAIWAN SEMICONDUCTOR MFG

Microelectronic fabrication method providing alignment mark and isolation trench of identical depth

Two step trench definition procedure for formation of a dual damascene opening in a stack of insulator layers

ZHANG YING

Wafer transfer pod for reducing wafer particulate contamination

CHENG TIEN-CHIH

Wafer support device