Inventor
KISHKOVICH OLEG P
US17 patents
⚠️ This page may combine multiple inventors who share the name “KISHKOVICH OLEG P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EXTRACTION SYSTEMS INC
8 patentsUS6096267AAug 1, 2000
System for detecting base contaminants in air
EXTRACTION SYSTEMS INC529 citations98
US6207460B1Mar 27, 2001
Detection of base contaminants in gas samples
EXTRACTION SYSTEMS INC46 citations95
US6296806B1Oct 2, 2001
Protection of semiconductor fabrication and similar sensitive processes
EXTRACTION SYSTEMS INC33 citations92
US6761753B2Jul 13, 2004
Methods using filters employing both acidic polymers and physical-adsorption media
EXTRACTION SYSTEMS INC20 citations91
US6740147B2May 25, 2004
Filters employing both acidic polymers and physical-adsorption media
EXTRACTION SYSTEMS INC32 citations91
US6855557B2Feb 15, 2005
Detection of base contaminants in gas samples
EXTRACTION SYSTEMS INC12 citations83
US6620630B2Sep 16, 2003
System and method for determining and controlling contamination
EXTRACTION SYSTEMS INC8 citations73
US6759254B2Jul 6, 2004
System and method for determining and controlling contamination
EXTRACTION SYSTEMS INC3 citations61
ENTEGRIS INC
5 patentsUS7400383B2Jul 15, 2008
Environmental control in a reticle SMIF pod
ENTEGRIS INC43 citations89
US7540901B2Jun 2, 2009
Filters employing both acidic polymers and physical-adsorption media
ENTEGRIS INC12 citations83
US7092077B2Aug 15, 2006
System and method for monitoring contamination
ENTEGRIS INC9 citations73
US7922791B2Apr 12, 2011
Filtering system for a semiconductor processing tool
ENTEGRIS INC5 citations62
US7329308B2Feb 12, 2008
Air handling and chemical filtration system and method
ENTEGRIS INC5 citations62