Inventor
SALDANA MIGUEL A
US12 patents
⚠️ This page may combine multiple inventors who share the name “SALDANA MIGUEL A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
10 patentsUS6520833B1Feb 18, 2003
Oscillating fixed abrasive CMP system and methods for implementing the same
LAM RES CORP23 citations91
US6083082AJul 4, 2000
Spindle assembly for force controlled polishing
LAM RES CORP36 citations91
US7481695B2Jan 27, 2009
Polishing apparatus and methods having high processing workload for controlling polishing pressure applied by polishing head
LAM RES CORP10 citations83
US7018273B1Mar 28, 2006
Platen with diaphragm and method for optimizing wafer polishing
LAM RES CORP13 citations83
US6585572B1Jul 1, 2003
Subaperture chemical mechanical polishing system
LAM RES CORP18 citations83
US6719874B1Apr 13, 2004
Active retaining ring support
LAM RES CORP7 citations73
US6640155B2Oct 28, 2003
Chemical mechanical polishing apparatus and methods with central control of polishing pressure applied by polishing head
LAM RES CORP8 citations72
US6561870B2May 13, 2003
Adjustable force applying air platen and spindle system, and methods for using the same
LAM RES CORP12 citations72
US6752703B2Jun 22, 2004
Chemical mechanical polishing apparatus and methods with porous vacuum chuck and perforated carrier film
LAM RES CORP5 citations62
US6902466B2Jun 7, 2005
Oscillating chemical mechanical planarization apparatus
LAM RES CORP0 citations51