Inventor
LIN TSANG-JUNG
TW5 patents
⚠️ This page may combine multiple inventors who share the name “LIN TSANG-JUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNITED MICROELECTRONICS CORP
4 patentsUS6100205AAug 8, 2000
Intermetal dielectric layer formation with low dielectric constant using high density plasma chemical vapor deposition process
UNITED MICROELECTRONICS CORP27 citations92
US6077147AJun 20, 2000
Chemical-mechanical polishing station with end-point monitoring device
UNITED MICROELECTRONICS CORP42 citations92
US6218320B1Apr 17, 2001
Method for improving the uniformity of wafer-to-wafer film thickness
UNITED MICROELECTRONICS CORP8 citations66
US6211060B1Apr 3, 2001
Method for planarizing a damascene structure
UNITED MICROELECTRONICS CORP3 citations60