Inventor
SCHWEITZER MARC O
US11 patents
⚠️ This page may combine multiple inventors who share the name “SCHWEITZER MARC O”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS7048837B2May 23, 2006
End point detection for sputtering and resputtering
APPLIED MATERIALS INC68 citations97
US6812471B2Nov 2, 2004
Method of surface texturizing
APPLIED MATERIALS INC67 citations92
US6669829B2Dec 30, 2003
Shutter disk and blade alignment sensor
APPLIED MATERIALS INC17 citations91
US6776848B2Aug 17, 2004
Motorized chamber lid
APPLIED MATERIALS INC21 citations90
US6933508B2Aug 23, 2005
Method of surface texturizing
APPLIED MATERIALS INC42 citations89
US7993470B2Aug 9, 2011
Fabricating and cleaning chamber components having textured surfaces
APPLIED MATERIALS INC8 citations82
US7097744B2Aug 29, 2006
Method and apparatus for controlling darkspace gap in a chamber
APPLIED MATERIALS INC12 citations81
US6827825B2Dec 7, 2004
Method for detecting the position of a shutter disk in a physical vapor deposition chamber
APPLIED MATERIALS INC12 citations72
US7371285B2May 13, 2008
Motorized chamber lid
APPLIED MATERIALS INC8 citations71
US6152074ANov 28, 2000
Deposition of a thin film on a substrate using a multi-beam source
APPLIED MATERIALS INC4 citations62