Inventor
CHIU CHING-SHIUN
TW7 patents
⚠️ This page may combine multiple inventors who share the name “CHIU CHING-SHIUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
6 patentsUS6872507B2Mar 29, 2005
Radiation correction method for electron beam lithography
TAIWAN SEMICONDUCTOR MFG30 citations91
US6190809B1Feb 20, 2001
Cost-effective method to fabricate a combined attenuated-alternating phase shift mask
TAIWAN SEMICONDUCTOR MFG24 citations91
US6361904B1Mar 26, 2002
Method for repairing the shifter layer of an alternating phase shift mask
TAIWAN SEMICONDUCTOR MFG19 citations90
US6174801B1Jan 16, 2001
E-beam direct writing to pattern step profiles of dielectric layers applied to fill poly via with poly line, contact with metal line, and metal via with metal line
TAIWAN SEMICONDUCTOR MFG17 citations83
US6432588B1Aug 13, 2002
Method of forming an improved attenuated phase-shifting photomask
TAIWAN SEMICONDUCTOR MFG8 citations73
US6261725B1Jul 17, 2001
Phase angle modulation of PSM by chemical treatment method
TAIWAN SEMICONDUCTOR MFG8 citations72