Inventor
FUJINOKI AKIRA
JP35 patents
⚠️ This page may combine multiple inventors who share the name “FUJINOKI AKIRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU QUARTZ PROD
14 patentsUS6296826B1Oct 2, 2001
Method for the preparation of vitrified silica particles
SHINETSU QUARTZ PROD35 citations92
US6094941AAug 1, 2000
Process for manufacturing optical member for excimer laser
SHINETSU QUARTZ PROD25 citations92
US5977000ANov 2, 1999
High purity opaque silica glass
SHINETSU QUARTZ PROD38 citations92
US5772714AJun 30, 1998
Process for producing opaque silica glass
SHINETSU QUARTZ PROD29 citations92
US5970746AOct 26, 1999
Method for preparing silica glass article
SHINETSU QUARTZ PROD23 citations91
US5790315AAug 4, 1998
Synthetic silica glass formed article for optical use
SHINETSU QUARTZ PROD34 citations91
US7841211B2Nov 30, 2010
Production process of synthetic quartz glass
SHINETSU QUARTZ PROD13 citations81
US6499315B1Dec 31, 2002
Production method for making an optical member for excimer laser using synthetic quartz glass
SHINETSU QUARTZ PROD7 citations74
US6209354B1Apr 3, 2001
Method of preparing silica glass article
SHINETSU QUARTZ PROD12 citations72
US7288775B2Oct 30, 2007
Synthetic quartz glass optical material for YAG laser with higher harmonic
SHINETSU QUARTZ PROD3 citations63
US7007510B2Mar 7, 2006
Method of producing an optical member
SHINETSU QUARTZ PROD4 citations62
US7790078B2Sep 7, 2010
Process for producing silica glass product
SHINETSU QUARTZ PROD2 citations59
US7093465B2Aug 22, 2006
Method for heat treating synthetic quartz glass for optical use
SHINETSU QUARTZ PROD0 citations52
US7111477B2Sep 26, 2006
Production method of optical synthetic quartz glass, optical synthetic quartz glass, and annealing furnace
SHINETSU QUARTZ PROD0 citations42
HERAEUS QUARZGLAS
12 patentsUS6483639B2Nov 19, 2002
Optical system for integrated circuit fabrication
HERAEUS QUARZGLAS21 citations93
US6887576B2May 3, 2005
Quartz glass body having improved resistance against plasma corrosion, and method for production thereof
HERAEUS QUARZGLAS15 citations92
US5766291AJun 16, 1998
Method for producing heat-resistant synthetic quartz glass
HERAEUS QUARZGLAS21 citations92
US7312170B2Dec 25, 2007
Optical synthetic quartz glass and method for producing the same
HERAEUS QUARZGLAS16 citations84
US6578382B2Jun 17, 2003
Synthetic quartz glass for optical use, heat treatment method and heat treatment apparatus for the same
HERAEUS QUARZGLAS12 citations74
US6031238AFeb 29, 2000
Projection aligner for integrated circuit fabrication
HERAEUS QUARZGLAS8 citations74
US6508084B1Jan 21, 2003
Method for producing optical quartz glass for excimer lasers and vertical-type heating furnace
HERAEUS QUARZGLAS12 citations73
US6689705B2Feb 10, 2004
Synthetic quartz glass optical material and optical member
HERAEUS QUARZGLAS9 citations72
US6480518B1Nov 12, 2002
Synthetic quartz glass member for use in ArF excimer laser lithography
HERAEUS QUARZGLAS11 citations72
US6266978B1Jul 31, 2001
Method for producing synthetic quartz glass for use in ArF excimer laser lithography
HERAEUS QUARZGLAS7 citations72
USRE41249EApr 20, 2010
Quartz glass body having improved resistance against plasma corrosion, and method for production thereof
HERAEUS QUARZGLAS4 citations62
US6810687B2Nov 2, 2004
Method for producing synthetic quartz glass members for excimer lasers
HERAEUS QUARZGLAS6 citations62
SHINETSU HANDOTAI KK
2 patentsSHIN ETSU QUARTZ PRODUCTS COMP
2 patentsUS5364433ANov 15, 1994
Optical member of synthetic quartz glass for excimer lasers and method for producing same
SHIN ETSU QUARTZ PRODUCTS COMP91 citations94
US5523266AJun 4, 1996
Optical member of synthetic quartz glass for excimer lasers and method for producing same
SHIN ETSU QUARTZ PRODUCTS COMP37 citations91