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Inventor
TANG ANLUN
US
3 patents
⚠️ This page may combine multiple inventors who share the name “TANG ANLUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
2 patents
US6686995B2
Feb 3, 2004
Two-dimensional UV compatible programmable spatial filter
KLA TENCOR TECH CORP
26 citations
84
US6686994B2
Feb 3, 2004
UV compatible programmable spatial filter
KLA TENCOR TECH CORP
8 citations
70
WEIFOUR INC
1 patent
US7796259B2
Sep 14, 2010
Rapid acquisition ellipsometry
WEIFOUR INC
0 citations
20