Inventor
VELLA ERIC N
US4 patents
Patents
4 patentsUS6833913B1Dec 21, 2004
Apparatus and methods for optically inspecting a sample for anomalies
KLA TENCOR TECH CORP44 citations89
US6686995B2Feb 3, 2004
Two-dimensional UV compatible programmable spatial filter
KLA TENCOR TECH CORP26 citations84
US7012683B2Mar 14, 2006
Apparatus and methods for optically inspecting a sample for anomalies
KLA TENCOR TECH CORP13 citations80
US6686994B2Feb 3, 2004
UV compatible programmable spatial filter
KLA TENCOR TECH CORP8 citations70