Inventor

RUNYON REX

US9 patents

⚠️ This page may combine multiple inventors who share the name “RUNYON REX”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

4 patents

US9395340B2Jul 19, 2016

Interleaved acousto-optical device scanning for suppression of optical crosstalk

KLA TENCOR CORP8 citations82

US9645093B2May 9, 2017

System and method for apodization in a semiconductor device inspection system

KLA TENCOR CORP3 citations69

US9176069B2Nov 3, 2015

System and method for apodization in a semiconductor device inspection system

KLA TENCOR CORP5 citations69

US10060884B2Aug 28, 2018

Interleaved acousto-optical device scanning for suppression of optical crosstalk

KLA TENCOR CORP0 citations50

KLA TENCOR TECH CORP

2 patents

US6686995B2Feb 3, 2004

Two-dimensional UV compatible programmable spatial filter

KLA TENCOR TECH CORP26 citations84

US6686994B2Feb 3, 2004

UV compatible programmable spatial filter

KLA TENCOR TECH CORP8 citations70

ZHAO GUOHENG

1 patent

US8194301B2Jun 5, 2012

Multi-spot scanning system and method

ZHAO GUOHENG20 citations92

HAN LIQUN

1 patent

US8294125B2Oct 23, 2012

High-sensitivity and high-throughput electron beam inspection column enabled by adjustable beam-limiting aperture

HAN LIQUN11 citations79

MANKOS MARIAN

1 patent

US8461526B2Jun 11, 2013

Electron beam column and methods of using same

MANKOS MARIAN2 citations58