Inventor

KUO CHANG

SG2 patents

⚠️ This page may combine multiple inventors who share the name “KUO CHANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AKRION LLC

1 patent

US6767877B2Jul 27, 2004

Method and system for chemical injection in silicon wafer processing

AKRION LLC67 citations89

KUO CHANG

1 patent

US9051923B2Jun 9, 2015

Dual energy solar thermal power plant

KUO CHANG57 citations85