Inventor
LOZES RICHARD L
US10 patents
⚠️ This page may combine multiple inventors who share the name “LOZES RICHARD L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUS7498591B2Mar 3, 2009
Critical dimension effects correction in raster pattern generator
APPLIED MATERIALS INC12 citations83
US7476879B2Jan 13, 2009
Placement effects correction in raster pattern generator
APPLIED MATERIALS INC9 citations83
US7209055B1Apr 24, 2007
Electrostatic particle beam deflector
APPLIED MATERIALS INC10 citations80
US6912323B2Jun 28, 2005
Method and apparatus for fast signal convolution using separated-spline kernel
APPLIED MATERIALS INC9 citations69
US6436607B1Aug 20, 2002
Border modification for proximity effect correction in lithography
APPLIED MATERIALS INC12 citations67
US7514682B2Apr 7, 2009
Electron anti-fogging baffle used as a detector
APPLIED MATERIALS INC2 citations62
US7244953B2Jul 17, 2007
Beam exposure writing strategy system and method
APPLIED MATERIALS INC2 citations62
US7476880B2Jan 13, 2009
Writing a circuit design pattern with shaped particle beam flashes
APPLIED MATERIALS INC3 citations56