Inventor
BROCK PHILLIP
US12 patents
⚠️ This page may combine multiple inventors who share the name “BROCK PHILLIP”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
10 patentsUS6730454B2May 4, 2004
Antireflective SiO-containing compositions for hardmask layer
IBM112 citations98
US6806026B2Oct 19, 2004
Photoresist composition
IBM62 citations95
US7678537B2Mar 16, 2010
Graded topcoat materials for immersion lithography
IBM44 citations92
US6818381B2Nov 16, 2004
Underlayer compositions for multilayer lithographic processes
IBM21 citations92
US6770419B2Aug 3, 2004
Low silicon-outgassing resist for bilayer lithography
IBM14 citations83
US7135595B2Nov 14, 2006
Photoresist composition
IBM4 citations73
US7014980B2Mar 21, 2006
Photoresist composition
IBM10 citations73
US6927015B2Aug 9, 2005
Underlayer compositions for multilayer lithographic processes
IBM10 citations73
US7867689B2Jan 11, 2011
Method of use for photopatternable dielectric materials for BEOL applications
IBM3 citations62
US7951524B2May 31, 2011
Self-topcoating photoresist for photolithography
IBM3 citations57