Inventor
SABOURI PEDRAM
US4 patents
Patents
4 patentsUS7077159B1Jul 18, 2006
Processing apparatus having integrated pumping system
APPLIED MATERIALS INC14 citations91
US6817377B1Nov 16, 2004
Processing apparatus having integrated pumping system
APPLIED MATERIALS INC32 citations91
US6589023B2Jul 8, 2003
Device and method for reducing vacuum pump energy consumption
APPLIED MATERIALS INC31 citations87
US7051759B2May 30, 2006
Processing apparatus having integrated pumping system
APPLIED MATERIALS INC2 citations61