Inventor
MOROZ PAUL
US12 patents
⚠️ This page may combine multiple inventors who share the name “MOROZ PAUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS7141763B2Nov 28, 2006
Method and apparatus for rapid temperature change and control
TOKYO ELECTRON LTD70 citations96
US6887341B2May 3, 2005
Plasma processing apparatus for spatial control of dissociation and ionization
TOKYO ELECTRON LTD25 citations92
US6868800B2Mar 22, 2005
Branching RF antennas and plasma processing apparatus
TOKYO ELECTRON LTD30 citations91
US7199327B2Apr 3, 2007
Method and system for arc suppression in a plasma processing system
TOKYO ELECTRON LTD22 citations90
US7998307B2Aug 16, 2011
Electron beam enhanced surface wave plasma source
TOKYO ELECTRON LTD14 citations83
US7938081B2May 10, 2011
Radial line slot antenna having a conductive layer
TOKYO ELECTRON LTD12 citations83
US7073383B2Jul 11, 2006
Apparatus and method for determining clamping status of semiconductor wafer
TOKYO ELECTRON LTD9 citations73
US6674241B2Jan 6, 2004
Plasma processing apparatus and method of controlling chemistry
TOKYO ELECTRON LTD9 citations73
US7186313B2Mar 6, 2007
Plasma chamber wall segment temperature control
TOKYO ELECTRON LTD2 citations62
US7109122B2Sep 19, 2006
Method and apparatus for reducing substrate charging damage
TOKYO ELECTRON LTD2 citations61
US6992892B2Jan 31, 2006
Method and apparatus for efficient temperature control using a contact volume
TOKYO ELECTRON LTD1 citations51