Inventor
SAWADA IKUO
JP17 patents
⚠️ This page may combine multiple inventors who share the name “SAWADA IKUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS7449414B2Nov 11, 2008
Method of treating a mask layer prior to performing an etching process
TOKYO ELECTRON LTD7 citations74
US7642193B2Jan 5, 2010
Method of treating a mask layer prior to performing an etching process
TOKYO ELECTRON LTD4 citations63
US7572386B2Aug 11, 2009
Method of treating a mask layer prior to performing an etching process
TOKYO ELECTRON LTD4 citations63
US9252001B2Feb 2, 2016
Plasma processing apparatus, plasma processing method and storage medium
TOKYO ELECTRON LTD2 citations61
US9165810B2Oct 20, 2015
Conveyance device and substrate processing system
TOKYO ELECTRON LTD3 citations60
US9343295B2May 17, 2016
Vaporizing unit, film forming apparatus, film forming method, computer program and storage medium
TOKYO ELECTRON LTD1 citations49
JAPAN AGENCY MARINE EARTH SCI
4 patentsUS9359870B2Jun 7, 2016
Method and system for recovering ocean floor hydrothermal mineral resources
JAPAN AGENCY MARINE EARTH SCI4 citations66
US12084948B2Sep 10, 2024
Method for recovering rare-earth mud, and recovery system
JAPAN AGENCY MARINE EARTH SCI0 citations46
US11454075B2Sep 27, 2022
Continuous drilling system
JAPAN AGENCY MARINE EARTH SCI0 citations43
US11225844B2Jan 18, 2022
Submarine drilling support system
JAPAN AGENCY MARINE EARTH SCI0 citations43