Inventor

VENTZEK PETER

JP46 patents

⚠️ This page may combine multiple inventors who share the name “VENTZEK PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VENTZEK PETER

TOKYO ELECTRON LTD

Systems and methods of control for plasma processing

Methods for extreme ultraviolet (EUV) resist patterning development

Broadband plasma processing systems and methods

Methods for anisotropic etch of silicon-based materials with selectivity to organic materials

Defect correction on metal resists

Quantification of processing chamber species by electron energy sweep

Impedance matching apparatus and control method

Mode-switching plasma systems and methods of operating thereof

Radical source with contained plasma

Broadband plasma processing systems and methods

Method for dry etching compound materials

Ion angle detector

Plasma processing methods using low frequency bias pulses

Method of forming a FET structure by selective deposition of film on source/drain contact

Systems and methods of control for plasma processing

Methods for extreme ultraviolet (EUV) resist patterning development

Methods for real-time pulse measurement and pulse timing adjustment to control plasma process performance

Fast neutral generation for plasma processing

Broadband plasma processing systems and methods

Method and apparatus for plasma processing

Defect correction on metal resists

Cyclic low temperature film growth processes

Method for dry etching compound materials

Pulsed capacitively coupled plasma processes

Cyclic plasma etch process

Methods and systems for focus ring thickness determinations and feedback control

Apparatus and process for electron beam mediated plasma etch and deposition processes

Ruthenium hard mask process

Plasma processing methods using low frequency bias pulses

Plasma processing apparatuses including multiple electron sources

Mode-switching plasma systems and methods of operating thereof

Plasma processing apparatuses having a dielectric injector

Plasma processing apparatus, plasma processing method and storage medium

Pulsed gas plasma doping method and apparatus

Apparatuses and methods for plasma processing

Gas cluster assisted plasma processing

Tailored electron energy distribution function by new plasma source: hybrid electron beam and RF plasma

Three-phase pulsing systems and methods for plasma processing

Plasma processing systems and methods for chemical processing a substrate

Monolayer film mediated precision material etch

Hybrid electron beam and RF plasma system for controlled content of radicals and ions

Monolayer film mediated precision film deposition

Microwave surface-wave plasma device

Microwave surface-wave plasma device

Process control enabled VDC sensor for plasma process

SAWADA IKUO

Plasma processing apparatus, plasma processing method and storage medium