Inventor
OHSHITA TATSURO
JP14 patents
⚠️ This page may combine multiple inventors who share the name “OHSHITA TATSURO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
13 patentsUS10553407B2Feb 4, 2020
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD47 citations97
US11170979B2Nov 9, 2021
Plasma etching method and plasma etching apparatus
TOKYO ELECTRON LTD4 citations73
US9978566B2May 22, 2018
Plasma etching method
TOKYO ELECTRON LTD2 citations71
US12537172B2Jan 27, 2026
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations62
US12136535B2Nov 5, 2024
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations62
US11133157B2Sep 28, 2021
Plasma processing apparatus
TOKYO ELECTRON LTD1 citations61
US9252001B2Feb 2, 2016
Plasma processing apparatus, plasma processing method and storage medium
TOKYO ELECTRON LTD2 citations61
US12322578B2Jun 3, 2025
Exhaust device, processing apparatus, and exhausting method
TOKYO ELECTRON LTD0 citations60
US11315770B2Apr 26, 2022
Exhaust device for processing apparatus provided with multiple blades
TOKYO ELECTRON LTD0 citations60
US12537168B2Jan 27, 2026
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations52
US11776795B2Oct 3, 2023
Plasma processing apparatus and power supply control method
TOKYO ELECTRON LTD0 citations51
US10297428B2May 21, 2019
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations50
US9343295B2May 17, 2016
Vaporizing unit, film forming apparatus, film forming method, computer program and storage medium
TOKYO ELECTRON LTD1 citations49