Inventor
MATSUZAKI KAZUYOSHI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “MATSUZAKI KAZUYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS10591194B2Mar 17, 2020
Temperature control method
TOKYO ELECTRON LTD1 citations61
US9252001B2Feb 2, 2016
Plasma processing apparatus, plasma processing method and storage medium
TOKYO ELECTRON LTD2 citations61
US10643839B2May 5, 2020
Film forming apparatus and film forming method
TOKYO ELECTRON LTD1 citations60
US9165810B2Oct 20, 2015
Conveyance device and substrate processing system
TOKYO ELECTRON LTD3 citations60
US10541158B2Jan 21, 2020
Temperature adjustment method using wet surface in a processing chamber
TOKYO ELECTRON LTD1 citations59
US11625518B2Apr 11, 2023
Learning device, inference device, and learned model
TOKYO ELECTRON LTD0 citations55
US9791191B2Oct 17, 2017
Temperature control apparatus, processing apparatus, and temperature control method
TOKYO ELECTRON LTD0 citations51
US10121680B2Nov 6, 2018
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations40
US10734221B2Aug 4, 2020
Method of manufacturing semiconductor device and method of forming metal oxide film
TOKYO ELECTRON LTD0 citations39