Inventor

KANG SONGYUN

JP8 patents

⚠️ This page may combine multiple inventors who share the name “KANG SONGYUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

3 patents

US12415248B2Sep 16, 2025

Substrate polishing apparatus, substrate polishing method using the same, and semiconductor fabrication method including the same

SAMSUNG ELECTRONICS CO LTD0 citations50

US12394640B2Aug 19, 2025

Apparatus for cleaning wafer

SAMSUNG ELECTRONICS CO LTD0 citations50

US12575349B2Mar 10, 2026

Process gas for cryogenic etching, plasma etching apparatus, and method of fabricating semiconductor device using the same

SAMSUNG ELECTRONICS CO LTD0 citations49

SAWADA IKUO

2 patents

US8636871B2Jan 28, 2014

Plasma processing apparatus, plasma processing method and storage medium

SAWADA IKUO14 citations80

US8419960B2Apr 16, 2013

Plasma processing apparatus and method

SAWADA IKUO2 citations59

TOKYO ELECTRON LTD

2 patents

US9252001B2Feb 2, 2016

Plasma processing apparatus, plasma processing method and storage medium

TOKYO ELECTRON LTD2 citations61

US9441292B2Sep 13, 2016

Etching method, etching apparatus, and ring member

TOKYO ELECTRON LTD0 citations49

SUZUKI AYUTA

1 patent

US8945413B2Feb 3, 2015

Etching method, etching apparatus, and ring member

SUZUKI AYUTA2 citations54