Inventor
KOUMOTO TAKEYOSHI
JP5 patents
Patents
5 patentsUS6562736B2May 13, 2003
Manufacturing method for semiconductor device
SONY CORP37 citations90
US7060582B2Jun 13, 2006
Adjusting the germanium concentration of a semiconductor layer for equal thermal expansion for a hetero-junction bipolar transistor device
SONY CORP2 citations60
US7507642B2Mar 24, 2009
Vapor-phase growth method, semiconductor manufacturing method and semiconductor device manufacturing method
SONY CORP1 citations59
US7303979B2Dec 4, 2007
Vapor-phase growth method, semiconductor manufacturing method and semiconductor device manufacturing method
SONY CORP2 citations59
US7157344B2Jan 2, 2007
Vapor-phase growth method, semiconductor manufacturing method and semiconductor device manufacturing method
SONY CORP0 citations48