Inventor
ATSUUMI KENJI
JP3 patents
Patents
3 patentsUS7507642B2Mar 24, 2009
Vapor-phase growth method, semiconductor manufacturing method and semiconductor device manufacturing method
SONY CORP1 citations59
US7303979B2Dec 4, 2007
Vapor-phase growth method, semiconductor manufacturing method and semiconductor device manufacturing method
SONY CORP2 citations59
US7157344B2Jan 2, 2007
Vapor-phase growth method, semiconductor manufacturing method and semiconductor device manufacturing method
SONY CORP0 citations48