Inventor
BISSCHOPS THEODORUS HUBERTUS J
NL13 patents
⚠️ This page may combine multiple inventors who share the name “BISSCHOPS THEODORUS HUBERTUS J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS7317504B2Jan 8, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV114 citations98
US7315346B2Jan 1, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV27 citations90
US6740891B2May 25, 2004
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV26 citations89
US6630984B2Oct 7, 2003
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV15 citations83
US7084953B2Aug 1, 2006
Lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV2 citations59
US6930753B2Aug 16, 2005
Lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV1 citations51
US7397040B2Jul 8, 2008
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV0 citations48
KONINKL PHILIPS ELECTRONICS NV
3 patentsUS6493423B1Dec 10, 2002
Method of generating extremely short-wave radiation, method of manufacturing a device by means of said radiation, extremely short-wave radiation source unit and lithographic projection apparatus provided with such a radiation source unit
KONINKL PHILIPS ELECTRONICS NV100 citations97
US6538257B2Mar 25, 2003
Method of generating extremely short-wave radiation, and extremely short-wave radiation source unit
KONINKL PHILIPS ELECTRONICS NV15 citations83
US6545377B2Apr 8, 2003
Coil with cooling means
KONINKL PHILIPS ELECTRONICS NV5 citations62