Inventor
PRIL WOUTER ONNO
NL11 patents
⚠️ This page may combine multiple inventors who share the name “PRIL WOUTER ONNO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
10 patentsUS7348574B2Mar 25, 2008
Position measurement system and lithographic apparatus
ASML NETHERLANDS BV138 citations98
US7333174B2Feb 19, 2008
Lithographic apparatus and method for determining Z position errors/variations and substrate table flatness
ASML NETHERLANDS BV140 citations93
US6747729B2Jun 8, 2004
Lithographic projection apparatus, device manufacturing method, device manufactured thereby and gas composition
ASML NETHERLANDS BV20 citations88
US7599043B2Oct 6, 2009
Position measurement system and lithographic apparatus
ASML NETHERLANDS BV4 citations62
US7310130B2Dec 18, 2007
Lithographic apparatus and position measuring method
ASML NETHERLANDS BV4 citations62
US7535578B2May 19, 2009
Lithographic apparatus and interferometer system
ASML NETHERLANDS BV4 citations61
US7251042B2Jul 31, 2007
Lithographic apparatus, interferometer and device manufacturing method
ASML NETHERLANDS BV4 citations61
US6987557B2Jan 17, 2006
Enhanced lithographic displacement measurement system
ASML NETHERLANDS BV3 citations59
US11476077B2Oct 18, 2022
Interferometric stage positioning apparatus
ASML NETHERLANDS BV0 citations51
US10768025B2Sep 8, 2020
Encoder, position measurement system and lithographic apparatus involving an enclosing device
ASML NETHERLANDS BV0 citations33