Inventor
VAN DER PASCH ENGELBERTUS ANTO
NL19 patents
Patents
19 patentsUS7362446B2Apr 22, 2008
Position measurement unit, measurement system and lithographic apparatus comprising such position measurement unit
ASML NETHERLANDS BV164 citations99
US7483120B2Jan 27, 2009
Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method
ASML NETHERLANDS BV121 citations98
US7348574B2Mar 25, 2008
Position measurement system and lithographic apparatus
ASML NETHERLANDS BV138 citations98
US7253875B1Aug 7, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV166 citations98
US7636165B2Dec 22, 2009
Displacement measurement systems lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV104 citations96
US7515281B2Apr 7, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV35 citations92
US7265366B2Sep 4, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations83
US7119886B2Oct 10, 2006
Lithographic apparatus, device manufacturing method, and angular encoder
ASML NETHERLANDS BV19 citations83
US7230676B1Jun 12, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV7 citations74
US7408617B2Aug 5, 2008
Lithographic apparatus and device manufacturing method utilizing a large area FPD chuck equipped with encoders an encoder scale calibration method
ASML NETHERLANDS BV2 citations63
US7599043B2Oct 6, 2009
Position measurement system and lithographic apparatus
ASML NETHERLANDS BV4 citations62
US7443511B2Oct 28, 2008
Integrated plane mirror and differential plane mirror interferometer system
ASML NETHERLANDS BV2 citations62
US7349072B2Mar 25, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations62
US7471373B2Dec 30, 2008
Lithographic apparatus with patterning device position determination
ASML NETHERLANDS BV3 citations60
US7126671B2Oct 24, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations58
US7317539B2Jan 8, 2008
Polarizing beam splitter device, interferometer module, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV1 citations52
US7474409B2Jan 6, 2009
Lithographic interferometer system with an absolute measurement subsystem and differential measurement subsystem and method thereof
ASML NETHERLANDS BV0 citations51
US7352473B2Apr 1, 2008
Lithographic apparatus, device manufacturing method, and computer program
ASML NETHERLANDS BV1 citations50
US7177059B2Feb 13, 2007
Device and method for manipulation and routing of a metrology beam
ASML NETHERLANDS BV0 citations47