P

Inventor

PUROHIT ASHWIN M

US14 patents
⚠️ This page may combine multiple inventors who share the name “PUROHIT ASHWIN M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AXCELIS TECH INC

4 patents
US7952851B2May 31, 2011

Wafer grounding method for electrostatic clamps

AXCELIS TECH INC10 citations82
US7751172B2Jul 6, 2010

Sliding wafer release gripper/wafer peeling gripper

AXCELIS TECH INC11 citations76
US9281227B2Mar 8, 2016

Multi-resistivity Johnsen-Rahbek electrostatic clamp

AXCELIS TECH INC3 citations72
US8023247B2Sep 20, 2011

Electrostatic chuck with compliant coat

AXCELIS TECH INC0 citations50

LEE WILLIAM D

4 patents
US8270142B2Sep 18, 2012

De-clamping wafers from an electrostatic chuck

LEE WILLIAM D6 citations70
US9048276B2Jun 2, 2015

Matched coefficient of thermal expansion for an electrostatic chuck

LEE WILLIAM D1 citations51
US9558980B2Jan 31, 2017

Vapor compression refrigeration chuck for ion implanters

LEE WILLIAM D0 citations39
US8241425B2Aug 14, 2012

Non-condensing thermos chuck

LEE WILLIAM D0 citations39

TAO TENG CHAO D

1 patent
US8422193B2Apr 16, 2013

Annulus clamping and backside gas cooled electrostatic chuck

TAO TENG CHAO D58 citations91

JUSTESEN PERRY J I

1 patent
US8941968B2Jan 27, 2015

Heated electrostatic chuck including mechanical clamp capability at high temperature

JUSTESEN PERRY J I6 citations77

AXCELIS TECHNOLOGY INC

1 patent
US7385799B1Jun 10, 2008

Offset phase operation on a multiphase AC electrostatic clamp

AXCELIS TECHNOLOGY INC6 citations59

PUROHIT ASHWIN M

1 patent
US8228658B2Jul 24, 2012

Variable frequency electrostatic clamping

PUROHIT ASHWIN M5 citations56

LEE WILLIAM DAVIS

1 patent
US8797706B2Aug 5, 2014

Heated annulus chuck

LEE WILLIAM DAVIS1 citations44

SMITH DAVID B

1 patent
US8902560B2Dec 2, 2014

Electrostatic chuck ground punch

SMITH DAVID B0 citations40