Inventor
FAN CHEN-PENG
TW12 patents
Patents
12 patentsUS6001690ADec 14, 1999
Method of forming flash EPROM by using iso+aniso silicon nitride spacer etching technology
TAIWAN SEMICONDUCTOR MFG29 citations92
US6031264AFeb 29, 2000
Nitride spacer technology for flash EPROM
TAIWAN SEMICONDUCTOR MFG26 citations90
US5879993AMar 9, 1999
Nitride spacer technology for flash EPROM
TAIWAN SEMICONDUCTOR MFG35 citations90
US5930664AJul 27, 1999
Process for preventing corrosion of aluminum bonding pads after passivation/ARC layer etching
TAIWAN SEMICONDUCTOR MFG41 citations89
US6524959B1Feb 25, 2003
Chemical mechanical polish (CMP) planarizing method employing derivative signal end-point monitoring and control
TAIWAN SEMICONDUCTOR MFG11 citations73
US6248661B1Jun 19, 2001
Method for monitoring bubble formation and abnormal via defects in a spin-on-glass planarization, etchback process
TAIWAN SEMICONDUCTOR MFG11 citations73
US6110843AAug 29, 2000
Etch back method for smoothing microbubble-generated defects in spin-on-glass interlayer dielectric
TAIWAN SEMICONDUCTOR MFG12 citations73
US6897147B1May 24, 2005
Solution for copper hillock induced by thermal strain with buffer zone for strain relaxation
TAIWAN SEMICONDUCTOR MFG8 citations68
US6376156B1Apr 23, 2002
Prevent defocus issue on wafer with tungsten coating on back-side
TAIWAN SEMICONDUCTOR MFG2 citations62
US7772625B2Aug 10, 2010
Image sensor having an RPO layer containing nitrogen
TAIWAN SEMICONDUCTOR MFG1 citations47
US7481910B2Jan 27, 2009
Method and apparatus for stabilizing plating film impurities
TAIWAN SEMICONDUCTOR MFG1 citations46
US7122471B2Oct 17, 2006
Method for preventing voids in metal interconnects
TAIWAN SEMICONDUCTOR MFG0 citations46