Inventor
SMYTH JOHN S
US6 patents
Patents
6 patentsUS7627622B2Dec 1, 2009
System and method of curve fitting
IBM80 citations94
US6735492B2May 11, 2004
Feedback method utilizing lithographic exposure field dimensions to predict process tool overlay settings
IBM61 citations92
US6922600B1Jul 26, 2005
System and method for optimizing manufacturing processes using real time partitioned process capability analysis
IBM31 citations91
US6965808B1Nov 15, 2005
System and method for optimizing metrology sampling in APC applications
IBM12 citations83
US6557163B1Apr 29, 2003
Method of photolithographic critical dimension control by using reticle measurements in a control algorithm
IBM14 citations83
US7660888B2Feb 9, 2010
Indicating network resource availability methods, system and program product
IBM6 citations58