Inventor
COWE ANDREW B
US6 patents
⚠️ This page may combine multiple inventors who share the name “COWE ANDREW B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MKS INSTR INC
3 patentsUS7501600B2Mar 10, 2009
Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel
MKS INSTR INC17 citations91
US7659489B2Feb 9, 2010
Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel
MKS INSTR INC13 citations89
US11854839B2Dec 26, 2023
Valve apparatuses and related methods for reactive process gas isolation and facilitating purge during isolation
MKS INSTR INC0 citations50