Inventor

COLLINS JR RONALD W

US4 patents

⚠️ This page may combine multiple inventors who share the name “COLLINS JR RONALD W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MKS INSTR INC

3 patents

US7501600B2Mar 10, 2009

Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel

MKS INSTR INC17 citations91

US7659489B2Feb 9, 2010

Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel

MKS INSTR INC13 citations89

US7073771B2Jul 11, 2006

Porous valve assembly

MKS INSTR INC3 citations60

APPLIED SCIENCE & TECH INC

1 patent

US6872909B2Mar 29, 2005

Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel

APPLIED SCIENCE & TECH INC55 citations95