Inventor
PHARAND MICHEL
US14 patents
⚠️ This page may combine multiple inventors who share the name “PHARAND MICHEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AXCELIS TECH INC
6 patentsUS7070661B2Jul 4, 2006
Uniform gas cushion wafer support
AXCELIS TECH INC18 citations82
US7026581B2Apr 11, 2006
Apparatus for positioning an elevator tube
AXCELIS TECH INC15 citations82
US7560705B2Jul 14, 2009
Workpiece handling scan arm for ion implantation system
AXCELIS TECH INC12 citations76
US7151658B2Dec 19, 2006
High-performance electrostatic clamp comprising a resistive layer, micro-grooves, and dielectric layer
AXCELIS TECH INC8 citations73
US7828504B2Nov 9, 2010
Combination load lock for handling workpieces
AXCELIS TECH INC4 citations58
US7100759B2Sep 5, 2006
Magnetic support structure for an elevator tube of a vertical rapid thermal processing unit
AXCELIS TECH INC0 citations33
NIKON CORP
3 patentsUS9778579B2Oct 3, 2017
System and method for controlling a temperature of a reaction assembly
NIKON CORP3 citations72
US10107654B2Oct 23, 2018
Rotary probe head
NIKON CORP0 citations37
US10451982B2Oct 22, 2019
Actuator assembly including magnetic sensor system for vibrationless position feedback
NIKON CORP0 citations31